EDWARDS ENT 渦輪分子泵浦
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| Model | nEXT240D | nEXT300D | nEXT400D | EXT75DX | EXT556H | |
| Inlet flange | DN | 100 ISO-K/CF | 160 ISO -K/CF | 63 ISO-K/CF | 40NW or 100ISO-K |
160 ISO -K/CF
|
| N2 | Ixs-1 | 240 | 300 | 400 | 61/42/66 | 540 |
| He | Ixs-1 | 240 | 340 | 390 | 57/49/59 | 580 |
| H2 | Ixs-1 | 165 | 280 | 325 | 53/48/54 | 500 |
|
Ultimate pressure
ISO/CF
|
mbar | <6X10-8(<5x10-10) | <1x10-8(<1x10-10) | <5x10-9(<5x10-10) | <1x10-10 | |
| Rotational Speed | rpm | 60000 | 90000 | 50000 | ||