兩段式真空泵浦
 |
| Model | E2M18 | E2M28 | E2M40 | E2M80 | E2M175 | E2M275 | |
| Displacement (m3/h) | 50Hz | 20.5 | 32.2 | 42.5 | 80 | 178 | 292 |
| 60Hz | 25 | 38.9 | 50.5 | 96 | 214 | 350 | |
| Ultimate Pressure GBI(mbar/ Torr) | 1X10-3/7.4*10-4 | ||||||
| 7X10-3/5.4X10-3 | |||||||
| Motor power(kw) | 50Hz | 0.55 | 0.75 | 1.1 | 2.2 | 5.5 | 7.5 |
| 60Hz | 0.75 | 0.90 | 1.5 | 3 | 6.5 | 8.5 | |
| lnlet/Exhaust flange | NW25 | ISO40 | ISO40 | ISO63/ISO40 | |||
| Weight(Kg) | 39 | 45 | 72 | 105 | 200 | 225 | |