SHINKO迴轉活塞式真空泵浦
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| Model | 1.5K | 2.5K | 4.5K | 7.5K | 15K |
| Displacement speed(L/min) | 1500 | 2500 | 4500 | 7500 | 15000 |
| Ultimate pressure(Torr) | 5X10-3 | 5X10-3 | 5X10-3 | 5X10-3 | 5X10-3 |
| Intake port(VG) | 50 | 80 | 80 | 100 | 150 |
| Power Requirements(kw) | 2.2 | 3.7 | 7.5 | 11 | 30 |